| 摘要 |
PROBLEM TO BE SOLVED: To provide a Q pole type mass spectrometer that enables to use under high pressure atmosphere not less than 0.1 Pa, to analyze mass of gas molecule continuously, then to sort by mass normally when an ion is entered at high speed so as to lower the effect by an end electric field near end face of a Q pole (fringing). SOLUTION: The Q pole type mass spectrometer is installed in low-pressure gas atmosphere by focusing attention on the movement in the direction of diameter of an ion to be measured within the Q pole region of the Q pole type mass spectrometer and the movement in the axial direction are independent. The movement of the ion proceeding from an ion source side to a collector side in the axial direction to be measured is controlled within the Q pole region and the ion to be measured is sorted by mass with the Coulomb force by the quadrupole high frequency electric field in the direction of diameter. |
