| 摘要 |
A substrate processing apparatus includes a process be for forming a processing chamber provided at its lower end with a furnace port, a boat for going in and out from the processing chamber to transfer a substrate or substrates into and out from the processing chamber, a chamber forming a eliminary chamber and disposed below the processing tube for staying the boat on standby, a seal flange disposed between the processing chamber and the preliminary chamber and having opening through which the boat passes, and a seal lid detachably disposed on the seal flange at the side of the processing chamber for seating on the seal flange to air-tightly close the opening.
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