| 摘要 |
An appearance inspection method, includes (a), (b), (c), (d), (e), (f), (g), and (h). The (a) includes providing an image data in which an inspected sample is photographed. The (b) includes detecting a brightness of each of a plurality of image units included in the image data based on the image data. The (c) includes detecting the number of the image units being identical with each other in the brightness for each of the brightness. The (d) includes detecting, as a measured maximum number, the number that is maximum of the detected numbers as a result of the (c). The (e) includes computing the measured maximum number to determine a set maximum number. The (f) includes determining a threshold level of the brightness based on the set maximum number. The (g) includes converting the image data into a binary pattern based on the threshold level. The (h) includes detecting a defect of the inspected sample based on the binary pattern.
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