发明名称 Semiconductor integrated circuit manufacturing method and bonding machine used for it
摘要 To stabilize the form of a letter S of an inner lead after bonding in a method of manufacturing muBGA.IC in which a chip is fixed via an insulating film on a tape carrier on one main surface of which plural inner leads are laid and each electrode pad of the chip is bonded to each inner lead, when the inner lead is bonded to the electrode pad, first, the chip is supplied in a fixed position for a bonding tool using a sprocket hole of the tape carrier. Next, the respective positions of the inner lead and the electrode pad are recognized using a feature lead and an electrode pad. Afterward, the center line of the inner lead is recognized, the inner lead is touched to the chip by the bonding tool and after the inner lead is pushed in the direction of the base and bent in the form of a letter S, the end of the inner lead is bonded to the electrode pad by thermocompression by the bonding tool.
申请公布号 US2001027606(A1) 申请公布日期 2001.10.11
申请号 US20010875165 申请日期 2001.06.07
申请人 HITACHI, LTD. 发明人 OHKUBO TATSUYUKI;NADAMOTO KEISUKE;KATAYAMA YOSHIFUMI
分类号 H01L21/60;H01L23/12;(IPC1-7):H05K3/00;H01R9/00 主分类号 H01L21/60
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