Open chamber-type X-ray analysis apparatus

摘要

The object of the present invention is to provide an open chamber-type X-ray fluorescence analysis apparatus capable of qualitatively and quantitatively analyzing light elements within a sample in a stable manner. A helium inlet is provided in an open chamber, a light element film attaching/detaching mechanism is provided at an open section, and an outlet for gas within the chamber is also provided. A stable state of a high concentration of helium gas with a low X-ray absorption rate can be maintained within the chamber by the introduction of helium gas.