Ion extraction apparatus for ion implantation system has electrode manipulator with actuators for adjusting slit width and moving electrode

摘要

The apparatus includes at least one electrode for extracting ions from an ion source. The electrode has a slit through which a beam of extracted ions passes. The electrode is mounted on an electrode manipulator with two actuators for selectively altering the width of the electrode slit in a direction transverse to the ion beam and for moving the electrode in a direction transverse to the ion beam, and a third actuator for moving the electrode in the direction of the ion beam. An Independent claim is included for a method of adjusting an electrode in an ion extraction apparatus.