| 摘要 |
An object to be marked is prepared. Laser beam of a wavelength that is transmitted by the material from which this object to be marked is formed is focused on the inner portion of said object to be marked, using an ftheta lens. A mark is formed in the region of the object to be marked where the laser beam is focused. The mark is positioned inside the object to be marked and does not extend to the surface thereof. Therefore, generation of dirt caused by marking, rupturing of the object to be marked, and the like, can be prevented.
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