| 摘要 |
The invention relates to a method for producing a micromechanical component, comprising the following steps: providing a substrate (1); providing a first micromechanical functional layer (5) on the sacrificial coating (4); structuring the first micromechanical functional layer (5) in such a manner that it is provided with a mobilizable sensor structure (6); providing and structuring a first sealing layer (8) on the structured first micromechanical functional layer (5); providing and structuring a second micromechanical functional layer (10) on the first sealing layer (8) that has at least a covering function and that is at least partially anchored in the first micromechanical functional layer (5); mobilizing the sensor structure (6); and providing a second sealing layer (8) on the second micromechanical functional layer (10). The invention further relates to a corresponding micromechanical component.
|
