| 摘要 |
<p>PROBLEM TO BE SOLVED: To produce a ferroelectric thin film in which the crystal grain size in the surface is small and uniform, and columnar crystal grains are generated by a solution coating method. SOLUTION: A raw material solution for a ferroelectric thin film in which butoxyethanol is used as a solvent, contains lead acetate, zirconium acetylacetonato and titanium tetraisopropoxide, a crack preventive and a coordination stabilizer are added to the solution. The raw material solution is applied dried and heated to crystallize by every one layer. By repeating of these processes, the ferroelectric thin film is produced.</p> |
