| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a method and a device to prepare thin ferroelectric film with improved fatigue characteristic and reduced deterioration of ferroelectric crystal structure due to the membrane stress generating in the heating stage and accumulated in the substrate at the crystallization of the membrane. SOLUTION: This method consists in heating and crystallizing the ferroelectric thin film laminated to the substrate in the deformed state by pressing down the substrate at the central part. By adjusting the amount of press- down, membrane stress applied to the ferroelectric thin film can be controlled as desired resulting in the improvement of the crystal structure.</p> |
