| 摘要 |
PROBLEM TO BE SOLVED: To provide a method and device for measuring stress wherein a magnetic anisotropic sensor is used to exclude the effect of a residual stress and lift-off, for accurate stress measurement. SOLUTION: The measuring device comprises a demagnetizer 2, a magnetic anistropy sensor(MAS) 3, a calculator 18 and the like. The calculator 18, based on the first and second measurement values acquired with different demagnetization direction, subtracts a specified value from a mean value of them, and its result is divided with a difference between the first measurement value and the second measurement value, providing a value corresponding to the stress at an object to be measured.
|
