TWO-DIMENSIONAL IMAGE DETECTOR AND ITS MANUFACTURING METHOD

摘要

PROBLEM TO BE SOLVED: To provide a two-dimensional image detector suppressing deterioration in the properties of a semiconductor film which is an electromagnetic wave induction layer. SOLUTION: A base substrate 50 having rigidity and thermal conductivity is stuck to an active matrix substrate 20 beforehand through a gel sheet 40 of a viscoelastic body having thermal conductivity. An amorphous semiconductor thick film is laminated and formed on the surface of the active matrix substrate 20 integrated with the base substrate 50. As a result, the deformation of the active matrix substrate 20 due to its own weight can be prevented by the rigidity of the base substrate 50 to eliminate the generation of stress on the semiconductor film, and it is possible to suppress the deterioration in the semiconductor film.