| 摘要 |
PROBLEM TO BE SOLVED: To correct an error of a measured data caused by a control error and the like of a scanning means to provide the precise measured data. SOLUTION: In this measuring instrument provided with an optical projection system 20 for projecting light U to scan optically a surface of an object by a galvanomirror, and provided with a photoreceiving optical system 40 for receiving the reflected light, of the projected light, reflected by the object using a photoreceiving element, and constituted to provide the measured data for three-dimensional measurement based on a signal output from the photoreceiving element, the measured data is corrected using an optical system 30 for reference light provided to project the reference light UR toward one portion of the object along an optical axis not consistent with an optical axis of the photoreceiving optical system 40, and wherein a projection starting position R and a projection angle of the reference light UR are known, and using a reference data provided by receiving the reflected light, of the reference light UR, reflected by the object using the photoreceiving element.
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