发明名称 QUARTZ GLASS CRUCIBLE FOR PULLING SILICON MONOCRYSTAL AND METHOD OF MANUFACTURING THE SAME
摘要 Provided are a quartz glass crucible for pulling up a silicon single crystal, with which not only a defectless silicon single crystal can be pulled up but a single crystallization ratio can greatly be improved, and a production method therefor. The quartz glass crucible comprises a crucible base body constituted of a semi-transparent quartz glass layer and a transparent quartz glass layer formed on the inner wall surface of the crucible base body and no expanded bubbles equal to or more than 0.5 mm in diameter are present in a layer 1 mm in depth from an inner surface of the quartz glass crucible after the silicon single crystal is pulled up using the quartz glass crucible. <IMAGE>
申请公布号 EP1020546(A4) 申请公布日期 2001.10.10
申请号 EP19990921237 申请日期 1999.05.24
申请人 SHIN-ETSU QUARTZ PRODUCTS CO., LTD. 发明人 SATO, TATSUHIRO;MIZUNO, SHIGEO;OHAMA, YASUO
分类号 C03B20/00;C03B19/09;C30B15/10;C30B29/06;C30B35/00 主分类号 C03B20/00
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