发明名称 METHOD FOR MANUFACTURING ACTIVE MATRIX SUBSTRATE WITH RESIN LAYER, AND LIQUID CRYSTAL ELEMENT
摘要 PROBLEM TO BE SOLVED: To reduce disconnection defects of the contact hole of an active matrix substrate, having a resin layer formed thereon. SOLUTION: A method for manufacturing the active matrix substrate with the resin layer, having a stage for forming the photosensitive resin layer on the active matrix substrate, a stage for pattern-exposure of the photosensitive resin layer and a stage for developing the photosensitive resin layer to form a contact part in the resin layer is characterized, in that the ratio of monomer weight (M)/binder weight (B), respectively contained in the photosensitive resin layer, is equal to 0.85-1.3 and the ratio of the photopolymerization initiator weight (K)/the monomer weight (M) respectively contained in the photosensitive resin layer is equal to 0.04-0.18.
申请公布号 JP2001281700(A) 申请公布日期 2001.10.10
申请号 JP20000101457 申请日期 2000.04.03
申请人 FUJI PHOTO FILM CO LTD 发明人 TANAKA MITSUTOSHI;ITO HIDEAKI
分类号 G03F7/004;G02F1/1333;G02F1/136;G02F1/1368;G09F9/30 主分类号 G03F7/004
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