| 摘要 |
PROBLEM TO BE SOLVED: To provide an ion source electrode having a high cooling efficiency, excellent in corrosion resistance, and extended in life. SOLUTION: This ion source electrode is provided with an electrode plate 2 consisting of a heat resisting material with a small thermal expansion coefficient and having a groove formed on the surface, and a cooling pipe 3 housed in the groove 4 of the electrode plate 2 and bonded thereto by a wax. A protective layer to the wax is provided on the wall surface of at least one of the groove 4 and the surface of the cooling pipe 3.
|
