| 摘要 |
PROBLEM TO BE SOLVED: To surely detect abnormality in a pattern even if a coating material is thick. SOLUTION: This inspection device 50 has a lighting part 52 below a CSP tape 10 and has a TV camera 26 over the CSP tape 10 to output image data of the CSP tape 10 produced by transmitted light 53. The lighting part 52 has a green-light irradiation unit 60, and white-light irradiation units 62a, 62b provided on both sides of the irradiation unit 60. The irradiation unit 60 irradiates the CSP tape 10 with green light 54 perpendicular thereto having large transmissivity relative to a solder resist 20. The irradiation units 62a, 62b irradiate the CSP tape with white light inclined relative to the CSP tape.
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