| 摘要 |
PROBLEM TO BE SOLVED: To provide a single crystal pulling apparatus which can align center of rotation for a winding structure and for a crucible and a wire fulcrum with ease from outside of the apparatus during the work of pulling single crystal. SOLUTION: At a part of the apparatus from a bearing structure, being positioned underneath of a winding structure, to a pull chamber, the apparatus is split in a crossing direction. A supporting plate is installed and fixed at top of the lower part of the split apparatus, and an alignment plate is installed and fixed at bottom of the upper part of the split apparatus. The alignment adjusting structure is then formed at the single crystal pulling apparatus by installing the alignment plate, in a state being horizontally movable, on the supporting plate.
|
