| 摘要 |
PROBLEM TO BE SOLVED: To provide an X-ray irradiation device capable of minimizing the dispersion of exposure within an X-ray irradiation area. SOLUTION: A mirror arranged in an optical path for propagating X-ray reflects the ray. An oscillating mechanism retains the mirror within the optical path, oscillates the mirror so as to change the incident angle of X-ray, and changes the advancing direction of the reflected X-ray. When the mirror is oscillated, the reflecting point of X-ray is moved on the reflecting surface of the mirror. The reflecting surface of the mirror is divided into at least two first and second areas differed in reflectance to X-ray. The incident angle of X-ray in the reflection in the first area is larger than the incident angle of X-ray in the reflection in the second area. The reflectance to X-ray of the first area is lower than the reflectance of the second area under the condition where the equal incident angle is equal to each other. |
