| 摘要 |
<p>To provide an article which can be produced at a low cost, is excellent in heat resistance, chemical resistance and dimensional accuracy, and has a predetermined surface shape, an optical waveguide which has high heat resistance and chemical resistance, a large difference in refractive index, small absorption at a communication wavelength of a near infrared range, reliability and a low loss at an optical communication range, and production processes therefor. A process for producing an article having a predetermined surface shape by disposing a sol-gel material between a substrate and a mold in the form of a film so as to make the sol-gel material closely contact with the substrate and the mold, and heating to form a gelled film having a surface shape which is the inversion of the surface shape of the mold on the surface of the substrate. When the sol-gel material contains at least one of a dialkyldialkoxysilane (or dialkyldihalogensilane) and an aryltrialkoxysilane or substituted aryltrialkoxysilane (or aryltrihalogensilane or substituted aryltrihalogensilane), and fluoroalkyltrialkoxysilane (or fluoroalkyltrihalogensilane), an article having a predetermined surface shape can be produced by the above process.</p> |
