| 摘要 |
PROBLEM TO BE SOLVED: To detect cyclic defects automatically and accurately from a small amount of data with little fluctuation of image signals including cyclic flaw parts even if the SN(signal-to-noise) ratio is low. SOLUTION: This method includes a step (step S3) for generating a defect- signal-emphasizing waveform, which emphasizes only a signal waveform peculiar to a defect signal, from a signal waveform obtained from an inspected object to perform the convolution of a composite function made by compositing a plurality of base functions corresponding to local frequencies specific to the defect portions with the original signal including the defects, and steps (steps S4, S5) for detecting the cyclic defects of the inspected object by performing frequency analysis on the defect-signal-emphasizing waveform by a maximum entropy method.
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