PROCESS OF TIGHTNESS TEST

摘要

leakage testing. SUBSTANCE: technical result of invention consists in possibility of adjustment and expansion of measurement range of value of leakage towards larger flows. Process involves connection of hollow object to mass spectrometric analyzer, pumping of object with the use of high-vacuum pump, letting of test gas through leak into hollow object and measurement of partial pressure of test gas by mass spectrometer. Pumping circuit securing circulating flow of test gas by way of its supply to outlet of high-vacuum pump and at same time to inlet of same pump with adjustment of value of circulating flow of test gas for adjustment of range of measurement of value of leak is formed between mass spectrometric analyzer and hollow object. EFFECT: possibility of adjustment and expansion of measurement range of leakage. 2 dwg