Vorrichtung zur Herstellung einkristalliner Schichten auf einkristallinen Grundkoerpern, vorzugsweise auf Scheiben, aus Halbleitermaterial,申请号DE1963S085866-传众专利搜索

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发明名称	Vorrichtung zur Herstellung einkristalliner Schichten auf einkristallinen Grundkoerpern, vorzugsweise auf Scheiben, aus Halbleitermaterial
摘要
申请公布号	DE1197059(B)	申请公布日期	1965.07.22
申请号	DE1963S085866	申请日期	1963.06.27
申请人	SIEMENS & HALSKE AKTIENGESELLSCHAFT	发明人	SCHLUETER DR. KURT;KAPPELMEYER DIPL.-ING. R.
分类号	C30B25/14	主分类号	C30B25/14
代理机构		代理人
主权项
地址

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