发明名称 FILM OPTICAL WAVEGUIDE AND METHOD FOR MANUFACTURING THE SAME
摘要 PROBLEM TO BE SOLVED: To provide a method for manufacturing a film optical waveguide which is optically coupled with low loss to another photodetecting optical parts and has excellent workability and an optical waveguide. SOLUTION: The method for manufacturing the film optical waveguide consisting in forming spherical recesses 11 on a substrate 1, coating the surface of the substrate 1 with a synthetic resin material, baking the coating to cure and form a clad layer 3 integrally formed with spherical convex lenses 6 on the under surface, coating the surface of the clad layer 3 with a synthetic resin material having the refractive index greater than the refractive index of the clad layer 3, baking the coating to cure and form a core layer 4, subjecting the core layer 4 to etching treatment to form optical waveguide cores 41 in correspondence to the spherical convex lenses 6, forming light exit inclined end faces 40 to the optical waveguide cores 41 so as to intersect with the central axes of the spherical convex lenses 6 and peeling the optical waveguide from the substrate 1 and the optical waveguide.
申请公布号 JP2001281486(A) 申请公布日期 2001.10.10
申请号 JP20000093926 申请日期 2000.03.30
申请人 JAPAN AVIATION ELECTRONICS INDUSTRY LTD 发明人 MIYASHITA TAKUYA
分类号 G02B6/42;G02B6/122;G02B6/13;H01L31/0232;(IPC1-7):G02B6/13;H01L31/023 主分类号 G02B6/42
代理机构 代理人
主权项
地址