DIFFRACTION OPTICAL ELEMENT AND ITS MANUFACTURING METHOD

摘要

PROBLEM TO BE SOLVED: To provide a diffraction optical element with high reproducibility of the dimension and the shape of its pattern and with reduced difference in the optical characteristics between itself and the substrate. SOLUTION: A grating composed of a composite material comprising a photosensitive organic polymer and inorganic particulates is formed on the substrate. The inorganic particulates are optionally provided with functional groups such as a photosensitive group or a reactive group. The average particle size of the inorganic particulates is about 2-1,000 nm. The ratio of the inorganic particulates, converted to solid matter, is about 30-95 wt.% of the composite material and is about 0.5-20 pts.wt. based on 1 pts.wt. of the photosensitive organic polymer. The diffraction optical element is manufactured by forming a photosensitive layer comprising the photosensitive organic polymer and the inorganic particulates on the substrate and by forming the grating with the pattern exposure and the development.