| 摘要 |
PROBLEM TO BE SOLVED: To provide a manufacturing method in which ceramics having improved characteristics such as crystallinity can be obtained while lowering a process temperature, and also to provide ceramics manufacturing equipment. SOLUTION: The method for manufacturing ceramics includes a step of mixing particles to be at least one of raw materials with activated species and feeding the resultant mixture to a substrate 10 to deposit a ceramic film 20 on the substrate 10. The manufacturing equipment consists of a supporting part 40 which soles also as a heating part for the substrate 10, a raw material particles feeding part 200, an activated species feeding part 100, and a mixing part 300 for mixing the raw material species with the activated species. |
