| 摘要 |
PROBLEM TO BE SOLVED: To provide a defect inspecting method only requiring a relatively small amount of data for image processing, capable of determining the quantity of defects, capable of detecting defects such as stains developed on a plurality of cyclic patterns, and having high defect detection sensitivity by reducing an effect of moire. SOLUTION: Rectangular areas 14 each have a length L and a width m equal to integral multiples of longitudinal and lateral intervals a, b, respectively, of each of cyclic patterns 10 on an inspected object. The rectangular areas 14 are set on an inspected surface without defining their positional relations relative to the cyclic patterns. The inspected surface is scanned to successively measure the quantity of light per rectangular area. For each rectangular area, a ratio is found of its measured value to the mean value of measured values with respect to a plurality of other rectangular areas. Whether or not a rectangular area has a defect is determined from above ratio thus found. |
