METHOD AND DEVICE FOR X-RAY FLUORESCENCE ANALYSIS

摘要

PROBLEM TO BE SOLVED: To perform an accurate X-ray fluorescence analysis of an arbitrary minute portion of a sample. SOLUTION: An adjustment sample 11 is used that has an area containing an objective element and having a rectilinear visible outline f on its surface. The adjustment sample 11 is placed on an r-θstage 5 so that the visible outline makes right angles with the r-direction in top plan view. While moving the sample in the r-direction, the intensity distribution of fluorescent X rays is measured with respect to the objective element. The adjustment sample 11 is 180 deg. rotated on the r-θstage 5 and the intensity distribution of fluorescent X rays is again measured in the same way. Based on the results of the distribution measurement, a position is found where the center of rotation of the r-θstage 5 agrees with a position faced on by a detection means 3 through an aperture 4a at a prescribed height above a surface of the sample in the r- direction movement of the r-θstage 5.