发明名称 SCANNING CAPACITANCE MICROSCOPE
摘要 PROBLEM TO BE SOLVED: To observe a sample regardless of combination between a probe and the observation sample, and to execute various measurements without exerting an influence of a noise or the like on the sample. SOLUTION: This microscope is composed of an oscillation circuit 202 which is a high-frequency oscillator having a variable frequency, for generating a high-frequency signal; a resonance circuit 206 for resonating by using a capacitor 205 which is a capacitance between a search needle of the probe 101 and the observation sample 102; and a detection circuit 201 connected to the oscillation circuit 202, for outputting a signal having the intensity based on the high-frequency signal generated by the oscillation circuit 602 and a resonance frequency in the resonance circuit 603. When the resonance frequency of the resonance circuit 202 is changed greatly, the oscillation frequency of the oscillation circuit 202 is changed, based on the changed resonance frequency, to observe the observation sample 102. A circuit such as a bias circuit or the like is connected to the probe side of the resonance circuit 206, to enable various measurements without exerting an effect of a noise or the like on the observation sample 102.
申请公布号 JP2001281125(A) 申请公布日期 2001.10.10
申请号 JP20000091799 申请日期 2000.03.29
申请人 CANON INC 发明人 SHITO SHUNICHI;ITSUJI TAKEAKI
分类号 G01N27/22;G01Q60/10;G01Q60/46;(IPC1-7):G01N13/20 主分类号 G01N27/22
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