ANTIREFLECTION FILTER AND METHOD FOR PRODUCING THE SAME

摘要

PROBLEM TO BE SOLVED: To provide an antireflection filter having superior low reflection characteristics while using the minimum number of layers. SOLUTION: The antireflection filter is produced through a least a first forming step in which a first constituent layer is formed on a substrate by wet-coating the top of the substrate with a coating agent containing inorganic fine particles and a resin material, a second forming step in which a second constituent layer is formed on the first constituent layer by depositing an inorganic oxide, nitride or oxynitride by physical or chemical vapor growth and a third forming step in which a third constituent layer is formed on the second constituent layer by depositing an inorganic oxide or fluoride by physical or chemical vapor growth.