| 摘要 |
PROBLEM TO BE SOLVED: To provide a diaphragm-type sensor capable of obtaining satisfactory measurement accuracy by securing sufficient gas permeability adaptable to the measurement of low-concentration gases, reliably holding an internal liquid, and performing precise work such as maintaining the constant locational relationship between a detecting electrode and gas-liquid separating film even in the case of forming the diaphragm-type sensor of a micro-size. SOLUTION: In the diaphragm-type sensor provided with a sensor main body 1, gas-liquid separating film 4, electrolyte 7, detecting electrode 2, and counter electrode 3, the sensor main body 1 comprises a pair of film junction planes 5a and 5b which are provided in parallel in the same plane and to which the gas-liquid separating film 4 is joined, electrolyte housing groove 6 with a rectangular bottom surface provided at a location sandwiched between the film junction planes 5a and 5b, and rectangular detecting electrode base 8 which is protruded from the bottom surface of the electrolyte housing groove 6 and in which its tip is extended to the vicinity of the same plane as the film junction planes 5a and 5b and the surface of the tip is in parallel with the film junction planes 5a and 5b. The detecting electrode 2 is provided at the tip surface of the detecting electrode base 8 of the sensor main body 1, and the counter electrode 3 is provided at the bottom surface of the electrolyte housing groove 6. |
