| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a method of photoelectron spectroscopic analysis capable of realizing more accurate and efficient measurement of insulating material, and equipped with a charge relaxing function with a wide relaxation margin by relaxing uneven charge-up. SOLUTION: This method of photoelectron spectroscopic analysis for an insulating material has, at least, a conductive-film forming process for forming a conductive thin film near a measured position of a sample prior to measurement, and a measurement process for performing measurement while irradiating the measured position with electron rays and applying a voltage on the thin film.</p> |
