PIEZOELECTRIC / ELECTROSTRICTIVE DEVICE AND METHOD OF MANUFACTURE THEREOF

摘要

A piezoelectric/electrostrictive device comprises a pair of mutually opposing thin plate sections (16a and 16b), a movable section (20), and a fixing section (22) for supporting the thin plate sections (16a and 16b) and the movable section (20). Piezoelectric/electrostrictive elements (24a and 24b) are arranged on at least one thin plate section (16a and 16b) of the pair of thin plate sections (16a and 16b). A hole (12) is formed by both inner walls of the pair of thin plate sections (16a and 16b), an inner wall (20a) of the movable section (20), and an inner wall (22a) of the fixing section (22). The piezoelectric/electrostrictive device further comprises at least one beam section (40) provided from the inner wall (20a) of the movable section (20) to the inner wall (22a) of the fixing section (22).