| 摘要 |
PROBLEM TO BE SOLVED: To prevent an adhering phenomenon in an ultrasonic motor having a low-friction sliding member attached to the low-friction sliding substance of the stator or rotor. SOLUTION: When the sliding surface of a low-friction sliding member is polished, polishing capable of excluding the generation of Si hydrates on surfaces to be polished is performed. For example, the sliding surface 12 of a stator 10 is dry-lap-polished rotating the stator 10 by a work driving means 30, through the medium of a tapelike film 23 put in a running state on a surface plate 22. |
