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发明名称
摘要
申请公布号
JP3216861(B2)
申请公布日期
2001.10.09
申请号
JP19950084373
申请日期
1995.04.10
申请人
发明人
分类号
H01L21/20;H01L21/336;H01L21/77;H01L21/84;H01L27/12;H01L29/786;(IPC1-7):H01L29/786
主分类号
H01L21/20
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代理人
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