Method of thinning an electron transparent thin film membrane on a TEM grid using a focused ion beam

摘要

A method of thinning a cut electron transparent membrane used in transmission electron microscopy is disclosed. An electron transparent thin film membrane is cut from a sample that is positioned within a focused ion beam device by focusing an ion beam in a predetermined direction onto the sample to mill the sample and cut the transparent thin film membrane from the sample. The membrane is mounted onto a transmission electron microscope grid having a mesh surface and carbon coating. It is mounted in a vertical orientation onto a support stage of a focused ion beam device such that the membrane is mounted vertically and parallel with the incident focused ion beam produced by the focused ion beam device. The support stage is tilted a predetermined amount to orient the membrane at an angle incident to the focused ion beam. The ion beam is focused at a glancing angle into a predetermined portion of the membrane for thinning the membrane by cutting a thin portion from the membrane.