发明名称 |
Wafer latch with a ball bearing assembly |
摘要 |
A latch for securing a wafer to a clamp plate. The latch may include a bearing that couples a wheel to a horizontal shaft. The horizontal shaft is adapted to rotate relative to the clamp ring so that the wheel secures the wafer. The bearing minimizes the amount of particles generated by the moving components of the latch that may contaminant the wafer.
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申请公布号 |
US6299153(B1) |
申请公布日期 |
2001.10.09 |
申请号 |
US19990361783 |
申请日期 |
1999.07.26 |
申请人 |
DISCREET INDUSTRIES CORPORATION |
发明人 |
MERON OVADIA;GENKIN DMITRIY |
分类号 |
H01L21/687;(IPC1-7):B23Q3/00 |
主分类号 |
H01L21/687 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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