| 摘要 |
PROBLEM TO BE SOLVED: To provide a tunnel junction element having a structure where a tunnel diaphragm constituting the tunnel junction is hard to be damaged at manufacturing. SOLUTION: A tunnel junction element 1 is provided where a tunnel diaphragm 4 is sandwiched between an upper electrode 5 and a lower-part electrode 3 to constitute a tunnel junction 6. Here, the upper-part electrode 5, the lower- electrode 3, and the tunnel diaphragm 4 constitute a laminated structure, and the outer perimeter of the tunnel junction 6 is partially covered with an anode oxide film 7 for separation. The anode oxide film 7 is so formed as to comprise at least a part of the upper-part electrode 5, the tunnel diaphragm 4, and the lower part electrode 3. Thus, the anode oxide film 7 is separated without exposing the tunnel diaphragm 4 for improved yield.
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