| 摘要 |
PROBLEM TO BE SOLVED: To provide a displacement element together with a sensor element which detects vibration of a movable part with precision, where mechanical rigidity at each junction between a thin plate and a movable part as well as a thin plate and a fixed part is raised, a resonance frequency is shifted upward easily, and displacement amount of the movable is increased. SOLUTION: A piezoelectric/electrostrictive device 1 is provided comprising a drive unit 3 which is driven by displacement of a piezoelectric/electrostrictive element 2, a movable part 4 operated by the drive unit, a fixed part for supporting the drive unit and the movable part, while the movable part is connected to the fixed part through the drive unit, and a hole 8 formed of inside walls of the drive unit, movable part, and fixed part. Related to the drive unit, one end of the piezoelectric/electrostrictive element, comprising a pair of facing thin plates 6 and 7, a pair of electrodes 2b and 2c provided at least on one outside surface of the thin plates, and a piezoelectric/electrostrictive film 2a, is provided on the fixed part or the movable part while the other end is provided on the thin plate, with the piezoelectric/electrostrictive film present across the movable part and the fixed part. |
