| 摘要 |
PROBLEM TO BE SOLVED: To provide a piezoelectric pump with a simple structure, in a small size, in low costs, and which is strong against foreign matters in a flow passage. SOLUTION: A driving part 1 of the piezoelectric pump is provided with a fixing wall 11, and a piezoelectric element 13 connected to the fixing wall 11 through a spring element 12, and an elastic wall 2 is disposed between the fixing wall 11 and the piezoelectric element 13, or between the fixing wall 11 and the spring element 12. |
