| 摘要 |
PROBLEM TO BE SOLVED: To provide a beam profile monitor which can detect with high sensitivity a profile of a beam wherein the number of particles is small and energy is weak. SOLUTION: A microchannel plate 20 having a structure wherein many channels are distributed two-dimensionally is arranged in the state that the channels are distributed along a plane intersecting a beam line. A multi-anode 21 is arranged in the front of the microchannel plate 20 in the traveling direction of a beam B. Electrons obtained from the microchannel plate 20 are detected by the multi-anode 21, and the profile of the beam is detected.
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