| 摘要 |
PROBLEM TO BE SOLVED: To determine a fringe phase simply and at a high accuracy at a prescribed time in the analysis of fringe information using a phase scanning method by using a p (x, y) bucket method, corresponding to a fringe position (x, y). SOLUTION: In the fringe phase determination method to determine a phase at a prescribed time in the scanning of phases when the quantity of scan covering the phases of a fringe is different according to the spatial positions (x, y) of the fringe, while one or more phases exist at all of the positions (x, y) of the fringe in obtaining the fringe information indicating the phase of a specimen using a phase scan method, pieces of time series fringe information equivalent to P (x, y) in number corresponding to the fringe positions (x, y) is obtained in advance within one phase scanning period. Intensities Ii (x, y) of P (x, y) pieces of light are determined at each of the fringe positions (x, y), based on the P (x, y) pieces of time series fringe information obtained and the phase at a prescribed time is determined at each of the fringe positions (x, y) using a prescribed conditional expression based on the intensities Ii (x, y) of P (x, y) pieces of light obtained.
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