| 摘要 |
PROBLEM TO BE SOLVED: To provide an air bearing cylinder inexpensive, which is easy to manufacture and superior in thrust characteristics. SOLUTION: A first pressure applying part 41 for canceling the self weight of a rod and a second pressure applying part 42 for driving control of the rod are formed on the peripheral surface of the rod 4 constituting a cylinder 1. The first and second pressure applying parts 41, 42 are formed along the longitudinal direction of the rod, so as to stand on different levels. Two kinds of mutually independent pressure applying chambers 27, 28 are formed between the inner wall surface of an insertion hole 3 and the peripheral surface of the rod 4. The first pressure applying part 41 is disposed in the first pressure applying chamber 27 and is structured with the control air being suppliable there via a first port 25. The second pressure applying part 42 is disposed in the second pressure applying chamber 28 and is structured so that the control air can be supplied there via a second port 26.
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