| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a method by which an integrated thin film solar battery containing a crystalline photoelectric conversion unit layer and having a high output characteristic can be manufactured. SOLUTION: In the integrated thin film solar battery, a back electrode layer 2, at least one crystalline semiconductor photoelectric conversion unit layer 3, and a transparent electrode layer 4, are successively formed on an insulating substrate 1 and divided into a plurality of portions by a plurality of separating grooves 2a and 4c so as to form a plurality of cells, and the cells are electrically connected in series through conductive connecting members. The method of manufacturing the solar battery includes a step of forming the groove 4c which separates the electrode layer 4 into a plurality of transparent electrodes into the electrode layer 4 through at least the whole thickness of the layer 4, by irradiating the free surface of the layer 4 with a scribing laser beam and, thereafter, completely separating a conductive semiconductor layer adjoining to the layer 4 from the layer 4 in the groove 4c by dry etching.</p> |
