发明名称 |
PHOTOELECTRIC CONVERTER AND PRODUCING METHOD THEREFOR |
摘要 |
<p>PROBLEM TO BE SOLVED: To provide a photoelectric converter with which efficiency of a reaction gas in the forming process of a semiconductor film having a crystal structure is improved, a crystalline semiconductor film improved in a crystal quality is formed on an inexpensive substrate and that crystalline semiconductor film is made into photoelectric converting layer. SOLUTION: This method has a first process for adding a catalyst element capable of lowering the crystallization temperature of the semiconductor film onto a conductive surface, a second process for forming the first semiconductor film having the crystal structure on the conductive surface added with the catalyst element, and a third process for forming the second semiconductor film containing phosphorus on the first semiconductor film.</p> |
申请公布号 |
JP2001274436(A) |
申请公布日期 |
2001.10.05 |
申请号 |
JP20000087673 |
申请日期 |
2000.03.27 |
申请人 |
SEMICONDUCTOR ENERGY LAB CO LTD |
发明人 |
YAMAZAKI SHUNPEI;ARAI YASUYUKI |
分类号 |
H01L21/205;H01L31/04;(IPC1-7):H01L31/04 |
主分类号 |
H01L21/205 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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