发明名称 PHOTOELECTRIC CONVERTER AND PRODUCING METHOD THEREFOR
摘要 <p>PROBLEM TO BE SOLVED: To provide a photoelectric converter with which efficiency of a reaction gas in the forming process of a semiconductor film having a crystal structure is improved, a crystalline semiconductor film improved in a crystal quality is formed on an inexpensive substrate and that crystalline semiconductor film is made into photoelectric converting layer. SOLUTION: This method has a first process for adding a catalyst element capable of lowering the crystallization temperature of the semiconductor film onto a conductive surface, a second process for forming the first semiconductor film having the crystal structure on the conductive surface added with the catalyst element, and a third process for forming the second semiconductor film containing phosphorus on the first semiconductor film.</p>
申请公布号 JP2001274436(A) 申请公布日期 2001.10.05
申请号 JP20000087673 申请日期 2000.03.27
申请人 SEMICONDUCTOR ENERGY LAB CO LTD 发明人 YAMAZAKI SHUNPEI;ARAI YASUYUKI
分类号 H01L21/205;H01L31/04;(IPC1-7):H01L31/04 主分类号 H01L21/205
代理机构 代理人
主权项
地址