| 摘要 |
PROBLEM TO BE SOLVED: To provide a gas laser device in which discharge across a pair of main discharge electrodes is performed simply so as to obtain a good-efficiency laser output and whose life can be extended. SOLUTION: In the gas laser device, a laser medium gas is discharge stimulated by the pair of main discharge electrodes, and a laser beam is generated. A plurality of preliminary rod-shaped ionization electrodes which preliminarily ionize the laser medium gas before the discharge of the main discharge electrodes are installed in parallel in the longitudinal direction of the main discharge electrodes. The interval between the adjacent preliminary ionization electrodes is set to be small in both ends of the main discharge electrodes with reference to their central part. |
