发明名称 SEMICONDUCTOR DEVICE AND ITS MANUFACTURING METHOD
摘要 PROBLEM TO BE SOLVED: To provide a semiconductor integrated-circuit device which comprises a test circuit hardly influencing the operation of an ordinary circuit and having a small chip area and which can be tested by an easy method. SOLUTION: A CMOS integrated-circuit device is provided with a MOS element (a test point cell) which is connected to the observation point of the integrated-circuit device. When a first control signal is input to the gate terminal of the MOS element, the MOS element is set to continuity, and a power-supply current flows to the integrated-circuit device. When a second control signal is input to the gate terminal, the MOS element is set to a cutoff state and the power-supply current does not flow to the integrated-circuit device in a static state. In a state that the MOS element is set to continuity, the power- supply current of the integrated-circuit device is measured. Thereby, whether the logical value of the observation point is correct or not is judged.
申请公布号 JP2001272439(A) 申请公布日期 2001.10.05
申请号 JP20000086978 申请日期 2000.03.27
申请人 NAKAMAE KOJI 发明人 FUJIOKA HIROSHI;NAKAMAE KOJI
分类号 G01R31/28;H01L21/66;H01L21/822;H01L27/04;(IPC1-7):G01R31/28 主分类号 G01R31/28
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