| 摘要 |
PROBLEM TO BE SOLVED: To provide a charged beam apparatus applicable to an in line evaluation which has a function of high speed and high precision incline observation as well as an incline observation method of a pattern. SOLUTION: A charged beam apparatus 10, which has an electron gun 12, a condenser lens 22, a scan deflector 26, an objective lens 28, and a secondary electron detector 82, is furnished further with a deflector 32 for observing inclination, arranged between the objective lens 28 and a sample S, which deflects a charged beam 6 just before incidence on the sample face to be incident at an angle with respect to a sample S. The deflection angle of the charged beam 6 is controlled by D.C. component being input to the deflector 32 for observing inclination. The deviation of an irradiation spot of the charged beam 6 due to an incline deflection is corrected and controlled by the observation position, feeding back an input value as well as an incline angle of the defector 32 for observing inclination to an input value of the scan deflector 26.
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