| 摘要 |
PROBLEM TO BE SOLVED: To enable use of a sample holder used in an STM as an aperture holder which is used in an FEM or an FIM. SOLUTION: This sample holder SH has a carrier bar connection member SH2 and a stage attaching/detaching member SH1, which are constituted attachable to and detachable from each other. The sample holder SH is carried by a holder carrier bar HB rotatably about the axis and movable back and forth relative to a sample stage, and is detachably installed to the sample stage. The stage attaching/detaching member SH1 has a tube-like body 46 with a through-hole 46a, formed between a sample stage side end part and a holder carrier bar side end part, and electrons or ions can pass therethrough in a state of separation of the carrier bar connection member SH2.
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