发明名称 MANUFACTURING METHOD OF MAGNETIC MEMORY
摘要 PROBLEM TO BE SOLVED: To provide a manufacturing method for magnetic memory comprising a plurality of magnetic memory elements, where a magnetized state recorded on a memory layer is present stably even if a pattern is micronized for less power consumption. SOLUTION: A manufacturing method is presented for the magnetic memory comprising a plurality of magnetic memory elements, where at least a first magnetic layer, a non-magnetic layer, and a second magnetic layer to be a recording layer are laminated. At least, a first magnetic layer to be a recording layer, a non magnetic layer and a second magnetic layer are succeedingly formed on a substrate as laminating films, and the laminating films are worked into forms of magnetic memory elements separated each other. An insulating layer is formed to fill the space between a plurality of magnetic memory elements on the substrate. A conductor layer and a third magnetic layer are succeedingly formed on the insulating layer on a plurality of magnetic memory elements as well as between the magnetic memory elements. The third magnetic layer is worked into a shape almost identical with the magnetic memory element. The conductor layer is so worked that adjoining magnetic memory elements are connected together only in one direction.
申请公布号 JP2001274480(A) 申请公布日期 2001.10.05
申请号 JP20000085564 申请日期 2000.03.27
申请人 SHARP CORP 发明人 MICHIJIMA MASASHI;HAYASHI HIDEKAZU;NAMIKATA RYOJI
分类号 H01L43/12;H01L21/8246;H01L27/105;H01L43/08;(IPC1-7):H01L43/12 主分类号 H01L43/12
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